【導(dǎo)讀】7,081,700.Laid-OpenNo.7-256575).manipulator.

　　

【正文】 ith, for example, a phase difference of 90xb0。. When the movable member 306 is to be rotated about the yaxis, a displacement in the xaxis direction (FIG. 4B) and a displacement in the zaxis direction (FIG. 4D) may be provided with, for example, a phase difference of 90xb0。. When the movable member 306 is to be rotated about the zaxis, a displacement in the xaxis direction (FIG. 4B) and a displacement in the yaxis direction (FIG. 4C) may be provided with, for example, a phase difference of 90xb0。. Alternating signals are supplied to the piezoelectric elements 303a to 303d in the same manner as in the form shown in FIGS. 3A to 3D. Alternatively, a platelike vibration member like the one disclosed in Japanese Patent LaidOpen No. 2021272147 may be used. FIG. 5 shows this vibration member. In this case, contact projections PC1 to PC4 are integrally formed at almost the middle portions of the four sides of a platelike vibration member 402. A projection PG having a mag 405 for attracting a movable member (the movable member 2 in FIG. 1) is formed at a central portion of the vibration member, and projections PE1 to PE4 are formed at the four corners of the vibration member. A vibration element 401 is formed by bonding/fixing a piezoelectric element 403 to the vibration member 302. The piezoelectric element 403 is driven to excite three different natural vibration modes in the vibration element 401. Combining these modes makes it possible to realize multiple degreeoffreedom driving, ., rotation about three orthogonal axes and rotation in two directions and about one axis. Referring to FIG. 1, the microhand 3 serving as an endeffector is placed in the center of the spherical movable member 2. However, the present invention is not limited to this. For example, the microhand 3 may be replaced with a microtool which cuts a manipulation target object or forms a hole in the object. Second Embodiment FIG. 6 is a view for explaining the second embodiment of the present invention. Since reference numerals 1 to 5, 7, 20, and 22 in FIG. 1 denote the same parts as in FIG. 6, a description thereof will be omitted. Reference numerals 61 and 62 denote microscopes for magnifying observation. In this embodiment, more visual information is acquired by using two microscopes placed at upper and lower positions, thereby improving operability. The two microscopes may have the same magnification power. However, decreasing the magnification of the lower microscope 61 to allow observation with a wide visual field will allow both observation with a low magnification and a wide visual field and observation with a high magnification and a narrow visual field. Reference numerals 81 and 82 denote optical sensors, which detect relative position changes of vibration elements 20 and movable member 2. A technique like that disclosed in Japanese Patent LaidOpen No. 1065882 can be used. The sensors 81 and 82 are identical sensors. The rotation axis and rotational speed of the movable member 2 can be obtained from movement information at two positions on the spherical surface. The sensors 81 and 82 are not limited to this system as long as they are twodimensional position sensors. Although an example of a noncontact optical system is shown in FIG. 6, for example, a ball mouse system maybe used, in which the rotation of balls in contact with the movable member 2 are separately detected as rotation ponents around two axes in two directions. The sensors 81 and 82 are mounted on a base 10 with a fixed frame 9. The vibration elements 20 are mounted on the fixed frame 9 with arm portions 1x2021。2x2032。 radially extending from an electrode plate portion for a piezoelectric ceramic 1x2021。2x2032。. Other points are the same as those in the first embodiment. FIG. 7 shows a modification in which the axis of the multiple degreeoffreedom vibration actuator is tilted. For example, the structure shown in FIG. 7 is effective for a case wherein two microhands 3 are used. The multiple degreeoffreedom vibration actuator may be located in any direction as long as the microscope 6 and stage 5 do not interfere with each other even if the spherical shell of the movable member 2 rotates in various directions. However, a wider movable range of the movable member 2 can be ensured by matching the optical axis of the microscope 6 with the axis of the multiple degreeoffreedom vibration actuator as shown in FIGS. 1 and 6. Third Embodiment FIG. 8 is a view for explaining the third embodiment. In this system, the rotating axes, each having one degree of freedom, are made to cross at one point, and the center of an endeffector is located near the intersection. Each axis is driven and controlled by a general rotary motor. However, an ultrasonic motor, electrostatic motor, or the like may be used. A system can be formed by using a general rotary encoder as a sensor which feeds back position information and velocity information. FIG. 8 shows only a mechanism which controls the posture of a microhand 3. Although an XYZ stage 5 and microscope 6 are arranged in the same manner as in the above embodiments, an illustration thereof is omitted in FIG. 8. Reference numeral 11 denotes a general rotary motor, which incorporates a position sensor such as an encoder. The rotary motor 11 is fixed to a fixed frame 9 along the zaxis which is the optical axis of the microscope 6 (not shown). An arm 15 is mounted on a rotating shaft 14. A rotary motor 12 similar to the rotary motor 11 is mounted on the distal end of the arm 15. An axis Z of the rotary motor 11 is perpendicular to an axis Y of the rotary motor 12. An arm 17 is also mounted on a rotating shaft 16 of the rotary motor 12. A similar rotary motor 13 is also mounted on the distal end of the arm 17. Th