【正文】 ......................................................................... 10 氧化鋅晶須生產(chǎn)工藝過(guò)程分析 ............................................................................... 10 晶須生長(zhǎng)機(jī)理過(guò)程分析 .................................................................................11 配氣過(guò)程耦合分析 ........................................................................................ 12 生產(chǎn)工藝中尾氣利用分析 ............................................................................ 12 系統(tǒng)控制要求及難點(diǎn) ............................................................................................... 12 系統(tǒng)設(shè)計(jì)思想及方法 ............................................................................................... 13 控制系統(tǒng)設(shè)計(jì) ........................................................................................................... 15 兩級(jí)計(jì)算機(jī)控制系統(tǒng) .................................................................................... 15 內(nèi)蒙古科技大學(xué)畢業(yè)設(shè)計(jì) 說(shuō)明書(shū)（畢業(yè) 論文 ） 硬件選型及特點(diǎn) ............................................................................................ 16 西門子 PLC .......................................................................................... 16 流量計(jì) .................................................................................................. 17 壓力 變送器 .......................................................................................... 18 執(zhí)行器 .................................................................................................. 19 控制系統(tǒng)組成 ................................................................................................ 20 第三章 氧化鋅晶須生產(chǎn)控制系統(tǒng)控制器設(shè)計(jì) .................................................................... 22 系統(tǒng)的數(shù)學(xué)模型 ....................................................................................................... 22 解耦控制器的設(shè)計(jì) .................................................................................................... 22 多輸入多輸出（ MIMO）系統(tǒng)建模方法 ..................................................... 22 解耦控制器的設(shè)計(jì)思路 ................................................................................ 23 前饋補(bǔ)償解耦控制器設(shè)計(jì)原理 .................................................................... 24 增量式 PID 控制器設(shè)計(jì) ........................................................................................... 26 PID 控制原理 ................................................................................................. 26 PID 控制器設(shè)計(jì) ............................................................................................. 28 基于 Simulink 控制系統(tǒng)仿真 ................................................................................. 30 Simulink 模塊庫(kù)介紹 ..................................................................................... 30 Simulink 下控制系統(tǒng)仿真 ............................................................................ 30 仿真結(jié)果及分析 ............................................................................................ 31 第四章 氧化鋅晶須生產(chǎn)控制系統(tǒng)軟件設(shè)計(jì) ........................................................................ 33 上位機(jī)監(jiān)控管理 ....................................................................................................... 33 MCGS 組態(tài)軟件的整體結(jié)構(gòu) ......................................................................... 33 監(jiān)控軟件結(jié)構(gòu)及功能 .................................................................................... 34 內(nèi)蒙古科技大學(xué)畢業(yè)設(shè)計(jì) 說(shuō)明書(shū)（畢業(yè) 論文 ） PLC 編程及算法實(shí)現(xiàn) ............................................................................................... 35 Siemens STEP7 標(biāo)準(zhǔn)軟件包 ......................................................................... 35 STEP7 編程 ..................................................................................................... 35 控制邏輯分析 ................................................................................................ 36 前饋解耦控制算法 ........................................................................................ 38 增量式 PID 算法實(shí)現(xiàn) .................................................................................... 39 第五章 控制系統(tǒng)的運(yùn)行效果與性能評(píng)價(jià) ............................................................................ 40 系統(tǒng)運(yùn)行效果 ........................................................................................................... 40 系統(tǒng)性能評(píng)價(jià) ........................................................................................................... 40 第六章 結(jié)束語(yǔ) ........................................................................................................................ 42 結(jié)論 ........................................................................................................................... 42 展望 ........................................................................................................................... 42 參考文獻(xiàn) .................................................................................................................................. 44 附錄 A 氧化鋅晶須的生產(chǎn)工藝圖 ...................................................................................... 46 附錄 B 數(shù)據(jù)顯示圖 .............................................................................................................. 47 附錄 C PID 算法在 PLC 中的具體實(shí)現(xiàn) .............................................................................. 48 致 謝 .................................................................................................................................... 51 內(nèi)蒙古科技大學(xué)畢業(yè)設(shè)計(jì) 說(shuō)明書(shū)（畢業(yè) 論文 ） 第一章 引 言 晶須是指具有一定長(zhǎng)徑比 (一般大于 10)和界面積小于 cm?? 的單晶纖維材料。then,according to a given mathematical model， we control oxygen content and flow in the Zinc oxide whiskers production process,with using of feedforward decoupling control algorithm and incremental PID control algorithm. Applications use MCGS configuration software and Siemens PLC S7300 series of the STEP 7 software development. MCGS configuration software uses one of the development of the control system monitoring software, control algorit