畢業(yè)論文_薄膜制造技術(shù)與工藝的研究(已修改)
2025-06-22 13:58 本頁(yè)面
【正文】 1 武 漢 職 業(yè) 技 術(shù) 學(xué) 院 畢 業(yè) 論 文 薄膜制造技術(shù)與工藝的研究 學(xué)院 :電子信息工程學(xué)院 專業(yè)：光電子技術(shù) 班級(jí) : 12302 姓名 : 黃健林 學(xué)號(hào)： 12021035 指導(dǎo)老師 :陳書劍 2021 年 11 月 17 日 2 摘要： 根據(jù)太陽(yáng)電池陣激光防護(hù)膜性能優(yōu)化的需要，應(yīng)用離子輔助電子束雙源共蒸工藝方法制備了優(yōu)化設(shè)計(jì)所需的特定折射率的薄膜材料并用于制備激光防護(hù)膜。 測(cè)試結(jié)果顯示：用該工藝方法制備的摻雜材料薄膜的折射率 n ＝１ .７５，與優(yōu)化設(shè)計(jì)所需數(shù)值相符；激光防護(hù)膜性能優(yōu)良，太陽(yáng)輻射能透過(guò)率提高６％以上，實(shí)現(xiàn)了對(duì)該激光防護(hù)膜性能的進(jìn)一步優(yōu)化。 為了使該雙源共蒸方法適于大面積薄膜的制備，應(yīng)用均勻性擋板技術(shù)來(lái)提高該方法制備大面積薄膜的膜厚均勻性，使制備的摻雜材料薄膜在口徑為４００ ｍｍ 時(shí)的不均勻性小于２ .１％。 該雙源共蒸方法制備工藝簡(jiǎn)單、可靠，適于實(shí)際工程應(yīng)用。 薄膜性能測(cè)試結(jié)果與理論優(yōu)化結(jié)果相符，達(dá)到預(yù)期優(yōu)化目標(biāo)。 關(guān) 鍵 詞： 薄膜材料；激光防護(hù)膜；折射率；摻雜；雙源共蒸 3 Abstract： According to the solar cell array laser protective film performance optimization, application of ion assisted beam double source preparation needed for the optimal design methods of steaming process specific refractive index of thin film materials and used for the preparation of laser protective film. Test results show that using the process method of the preparation of doped materials film refractive index n = 1 . 75, consistent with the numerical optimization design。 Laser protective film, the excellent performance of solar radiation transmittance increased by more than 6%, achieved to optimize the performance of the laser protective film. In order to make the double source with steaming method is suitable for the preparation of large area of thin film, application of uniformity of damper technology to improve the method preparation of large area of film thickness uniformity, make preparation of doped material thin film when the diameter is 400 mm the inhomogeneity of less than % 2 .1. The dualsource were steaming method preparation technology is simple, reliable and suitable for engineering application. Membrane performance test results and the theory of optimization results of the desired optimization goal .Key Words： Thin film materials。 Laser protective film。 The refractive index. Doping。 Dualsource were steamed. 4 目 錄 １ 引 言 ........................................................5 光學(xué)薄膜簡(jiǎn)介 ...................................................5 簡(jiǎn)介 ......................................................5 特點(diǎn) ......................................................5 分類 ......................................................5 制備 ......................................................6 應(yīng)用 ......................................................6 光學(xué)薄膜的發(fā)展及分類、關(guān)鍵技術(shù)匯總 .............................7 2 特定折射率材料的需求 .......................................9 ........................................10 3． 1 以往摻雜材料制備 ............................................10 3． 2 雙源共蒸法 ..................................................11 3． 3 均勻性保證 ..................................................12 ４ . 結(jié)果與討論 ................................................12 ５ 結(jié) 論 ......................................................14 參考文獻(xiàn) ........................................................15 致謝 .............................................................17
畢業(yè)設(shè)計(jì)相關(guān)推薦
鄂ICP備17016276號(hào)-1