sentaurus課程-文庫吧
2025-04-24 22:10 本頁面
【正文】 ion dimension. 2 The inputs to Ligament are a process flow, process libraries, layouts, and other TCADrelated information. 3 The outputs are process simulator mand files or other translation targets. 4 Ligament provides a graphical flow editor, a graphical layout editor, and a translator module Ligament ? 1 macro的創(chuàng)建 ? 2 Add Process Header ? Environment ? Substrate ? Defining Grids Ligament—Defining Grids ? User Grid ? The initial grid of Sentaurus Process is defined in the environment section in the entry user_grd and the subentry sprocess. Ligament—Defining Grids 例如： line x location= spacing= nm tag=SiTop line x location=nm spacing=nm line x location= um spacing=nm line x location= um spacing= um line x location= um spacing= um line x location=um spacing= um tag=SiBottom line y location= spacing=nm tag=Mid line y location=um spacing=nm tag=Right Ligament—Defining Grids ? Sentaurus Process uses coordinate systems such that 1D and 2D (and 3D) simulations are consistent. For 1D, the natural choice for x is to point downwards (into the wafer)。 Sentaurus Process keeps this definition for 2D. Consequently, the yaxis points to the side (parallel to the wafer). Ligament—Defining Grids ? Mgoals ? The initial grid is valid until the first mand that changes the geometry,
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