【正文】
???????????????? GSaGSaVxkqNkVkqNCCC ?? 歸一化電容 隨著外加偏壓 的增加而減小 . Q?Q??W 2022/2/11 41 Inversion oxC invCQ?Q??wdm Once the inversion layer forms, the capacitance starts to increase, since csi is now given by the variation of the inversion charge with respect to which is much large than the depletion capacitance s?s?2022/2/11 42 反型區(qū)( 0) 0CC ????????SBSISSs ddQddQddQC???GV2022/2/11 43 In low frequency, the generationrebination rates in the surface depletion region are equal to or faster than the voltage variation, then the electron concentration (minority) can follow the alternating current (ac) signal and lead to charge exchange with the inversion layer in step with the measurement signal. The incremental charges appears at the edge of the depletion region in high measurement frequency. 2022/2/11 44 CV Curves Deep depletion 2022/2/11 45 Frequency Effect The frequency of ac signal play an important role in the capacitance of a MOS Capacitor (after Grove, et al.) 2022/2/11 46 對理想 MOS二極管,判斷: ? Φ ms= Φ m – Φ s0, ? Φ ms= Φ m – Φ s0, 2022/2/11 47 例題: P型襯底, Na= 1014cm3, 氧化層厚度500197。求閾值電壓 VT, 畫出能帶圖 ,氧化層上壓降是多少?