vacuumpump真空泵ppt課件-文庫吧資料
2025-05-11 18:28本頁面
【正文】 ped either chemically or physically within the pump. There are sputter ion pump, sublimation pump and sorption pump in entrapment pumps. Vacuum pumps can be classified as either gas transfer pumps or entrapment pumps, according to their overall pumping mechanism. 05/10/2022 Title 4 VACUUM PUMPING METHODS Sliding Vane Rotary Pump Molecular Drag Pump Turbomolecular Pump Fluid Entrainment Pump VACUUM PUMPS (METHODS) Reciprocating Displacement Pump Gas Transfer Vacuum Pump Drag Pump Entrapment Vacuum Pump Positive Displacement Vacuum Pump Kiic Vacuum Pump Rotary Pump Diaphragm Pump Piston Pump Liquid Ring Pump Rotary Piston Pump Rotary Plunger Pump Roots Pump Multiple Vane Rotary Pump Dry Pump Adsorption Pump Cryopump Getter Pump Getter Ion Pump Sputter Ion Pump Evaporation Ion Pump Bulk Getter Pump Cold Trap Ion Transfer Pump Gaseous Ring Pump Turbine Pump Axial Flow Pump Radial Flow Pump Ejector Pump Liquid Jet Pump Gas Jet Pump Vapor Jet Pump Diffusion Pump Diffusion Ejector Pump Self Purifying Diffusion Pump Fractionating Diffusion Pump Condenser Sublimation Pump 05/10/2022 Title 5 PUMP OPERATING RANGES 1012 1010 108 106 104 102 1 10+2 P (mbar) Rough Vacuum High Vacuum Ultra High Vacuum Venturi Pump Rotary Vane Mechanical Pump Rotary Piston Mechanical Pump Sorption Pump Dry Mechanical Pump Blower/Booster Pump High Vac. Pumps UltraHigh Vac. Pumps 05/10/2022 Title 6 parameter and classification ? ultimate pressure lowest pressure at its inlet leakage vapour pressure ? pressure range (useful pumping action) adjacent 相近的 ? pumping speed( function of pressure) The pumping speed is the volumetric flow through the pump’s intake port. ? specific ?exhaust pressure ? selectivity 抽氣選擇性 ? position of the residual gas ? from my point of view (viewpoint) in my opinion ? roughing pump: pumping to acceptable operating pressure ? backing pump: maintance of required low pressure at the out let of another pump ? outlet/inlet ? operating pump: 啟動壓強 ? sub: submicron, subsidiary pany， subsequent ? immobilize 固定不動 mobile phone ? ionization電離 sorption 吸附 05/10/2022 Title 7 Pumping Speed 1010 103 101 Pumping Speed (Air) 1 2 3 4 Inlet Pressure (Torr) Critical Point 1. Compression Ratio Limit 2. Constant Speed 3. Constant Q (Overload) 4. Mechanical Pump Effect 05/10/2022 Title 8 Selectivity Molecular pump Sorption pump 05/10/2022 Title 9 Rotary vane pump Oil sealed rotary vane pumps are suitable for the direct production of rough and medium vacuum. They are also used extensively to back roots vacuum, turbomolecular and diffusion pumps. Four stages in the cycle of a rotary vane pump The mechanism, which is lubricated by oil, consists of a housing with a cylindrical bore into which is f
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