【正文】 he etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti effect but to lose the bridge balance, the output and the pressure bees the proportion the electrical signal. Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, several 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter. The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over e the nonmetallic strain gauge easily the temperature influence insufficiency, has the high stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision which the type brought, sluggish big, shorting and so on slow change, had the precision high, the re liability is high, the volume small characteristic, widely used in domain and so on aviation, petroleum, chemical industry, medical service. Integrates the sensor the superiority is the traditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part and send the part will integrate on together the chip, will cause it to have the calibration, to pensate, from the diagnosis and the work correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR Corporation will develop, each week will be able to produce 10,000. The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microputer and the sensor unifies, it has at the same time the examina tion, the judgment and the information processing function, pares with the traditional sensor has very many characteristics: Has the judgment and the information processing function, can carry on the revision, the error to the observed value pensates , thus enhancement measuring accuracy。 enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low. In semiconductor technology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on.. The Japanese horizontal river pany uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing。 The temperature coefficient is small. The ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the heavy film electronic technology, its technical performance is stable, the year drifting quantity is smaller than %, warm floats is smaller than 177。 The speed of response is quick, is smaller than 1S。 Making the pressure transmitter with the ceramics. The high polymer can bee the proportion adsorption and the release hydrogen along with the environment relative humidity size. The high polymer electricity lies between the constant to be small, the hydrogen can enhance the polymer the coefficient of dialectical loss. Making the capacitor the high polymer dielectr ic medium, determines the electric capacity cape city the change, then obtains the relative humidity. Making the plasma using this principle to gather the legitimate polystyrene film temperature sensor below, it has the characteristic. Measured the wet scope is wide。% of full scale is quoted (iii)displacement ranges 25*106 m to 103m (iv)rise time less than 50us possible Typical measurands are displacement, pressure, vibration, sound, and liquid level. 5 Linear Variabledifferential Ttr