facilitygascabinetcylinderchangeoi(編輯修改稿)
2025-07-20 19:10 本頁面
【文章內(nèi)容簡(jiǎn)介】 controls which panel will deliver gas to the process line.ACV (V10) Automatic Cylinder ValveThis highpressure pneumatic valve controls the supply of process gas from the cylinder. This valve is located on the cylinder and can be manually locked shut.TAP (V11) Test Acces Port Valve (only PH3 and SiH4 panel use)EFS Excess Flow SwitchSPT Supply Pressurt TransducerDPT Delivery Pressure TransducerHPL High Pressure Leak Test Gas Inlet (only PH3 and SiH4 panel use) Location: Inert gas room , Toxic/Flammable gas room , Corrosive gas room and Pyrophoric gas room in Fab11 , Fab11 Subfab 4. Nomenclature: Gas cabinet5. Reference: The gas cabinet operation manual of ALS6. Responsibility: Facility Gas section shift engineer amp。 TGM team7. 機(jī)臺(tái)操作: 操作步驟: 參見Gas Cabinet cylinder change OI flow chart.Gas cabinet cylinder change OI Flow ChartPress purge Button and select left or right cylinder purgecylinder autoswitch alarm Input cylinder purge passwordPanel stopped. Panel purge , press continueClose cylinder valve amp。 Lock cylinder valve, press continu
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