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Small CMM (SCMM) Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan (NPL) — Small CMM (SCMM) 國內(nèi)外研究概況 (NPL) — Small CMM (SCMM) Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan Source: 1. Annals of the CIRP Vol. 47/1/1998 , 2. Annals of the CIRP 3. Proc. Of 16th ASPE , 4. Note : Philips CFT 100*100*40 mm , Uncertainty 50nm (20xx/8 News) 荷蘭 Eindhoven大學(xué)的 高精度 3DCMM ?測量范圍 : 100*100*100 mm ?線性步進(jìn)壓電馬達(dá) +光柵尺 ?MEMS 探頭直徑 : ?測量不確定度 : 50nm Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan MEMS 探頭 E : elastic elements B : frame bars (stiff) S :Piezo amp。 strain