【正文】 Ligament ? etch ? insert Mask mask name=vtmodify segments= {1 3} photo thickness=2 mask=vtmodify 定義電極 ? contact name=source point x= y= replace ? contact name=drain point x= y= replace ? contact name=gate point x= y=0 replace ? contact name=substrate bottom 編譯和語法糾錯 Assignment Sentaurus 課程 第二講 ? Adding Parameters ? In Sentaurus Workbench, parameters can be defined and multiple values can be assigned to them to create splits in experiments (simulations). Each value of a parameter creates an additional experiment。 therefore, for N values of a parameter, there are N experiments. For two parameters P1 and P2 with M and N values, respectively, there are M x N possible experiments. MGOALS Meshing Template Boxbased meshing strategy: Parameterization ? 1. gate length Lg, ? 2. gate oxide thickness Tox, ? 3. length of the LDD spacer LspLD, ? 4. length of the SD spacer LspSD (not used), ? 5. length of the source/drain contact LSD, ? 6. depth of the implanted well WellDepth, ? 7. depth of the halo profile HaloDepth, ? 8. extension junction depth XjLD, ? 9. source/drain junction depth XjSD (not used). MGOALS Meshing Template File Types Used in Sentaurus Process The main file types used in Sentaurus Process are: ? Sentaurus Process mand file (*.cmd) This file is the main input file type for Sentaurus Process. It contains all process steps and can be edited. This file is ref