【正文】 顯示，然后按下 [space]鍵啟用 /關閉 檢驗欄。 使用指針按鈕來改變選擇。在許多菜單中使用 (如工藝選擇 的 控制菜單 )。這意味著一個單選 按鈕不可能是無效的 ，除非至少有一個不同的單選 按鈕已經被激活使前一個按鈕 失效 。standard. For further information see the WINDOWS174。 8 Software 軟件 Windows 2020 English with Service Pack 4 is used as operating system for controlling and operating PC. 采用 Windows 2020 English with Service Pack 4 操作系統。 PC機作為主機，連接于一個雙絞線。 Service mode for supporting system startup, troubleshooting, system and controller configuration using machine parameters 維護模 式：支持系統啟動，故障診斷， 使用機器參數進行系統和 控制器布局。 3 外蓋控制 …. ...................................................................................................44 控制 ..............................................................................................................44 泵 ..................................................................................................................46 人工傳輸 …… ..............................................................................................48 6 維護 ...........................................................................................................50 測試點 ……….. ..............................................................................................50 主要分布 ............................................................................................................51 機械節(jié)點 A2.......................................................................................................54 機械節(jié)點 A3.......................................................................................................56 等離子源 ............................................................................................................58 傳輸系統 ............................................................................................................59 氣體系統 ............................................................................................................61 登錄和退出 ….. ..............................................................................................62 用戶管理 ……….. ..........................................................................................63 診斷 (只針對有權限人員 )...........................................................................64 7 信息列表 ...................................................................................................65 8 故障檢修 ...................................................................................................67 經典資料， WORD 文檔，可編輯修改，歡迎下載交流。 經典資料， WORD 文檔，可編輯修改，歡迎下載交流。 經典資料， WORD 文檔，可編輯修改，歡迎下載交流。 Identification of hard and software 硬件和軟件的識別 Hardware硬件 The control software for the SiNA L system is installed on an industrial PC (Intel Celeron GHz, 256 MB RAM, 80 GB Seagate HDD, “ FD, LG DVD CDROM, AOpen graphics card, work interface card on board, Windows 2020 English + Service Pack 4). This PC includes a 15 TFT color monitor and a 19 keyboard with touch pad. SiNA L系統的控制軟件安裝在 PC機上（ Intel 賽揚 經典資料， WORD 文檔，可編輯修改，歡迎下載交流。 The plasma sources are driven through a CAN bus plugin card (PCI 331) in the PC.等離 子源通過一個 CAN總線插入式卡（ PCI 331）驅動。 Visual system with VAC_NT, Version 帶 VAC_NT的可視化系統 , Graphic visualization of all data, set points, process states and user inputs 所有數據， 設定點，過程狀態(tài)和用戶輸入的圖像可視化 Menucontrolled process operating with keyboard and touch 板的菜單控制過程操作 Manual operation for selected functions. 已 選 功能的人工操作 Automatic operation for processes using parameters 使用參數過程的自動操作 Databaseoriented control and management of procedures 數據庫導向控制和管理程序 Eventcontrolled message logging 事件控制信息的錄入 Protocol recording during the process run 工藝運行過程的協議記錄 Diagnosis function (I/O list) 診斷功能 (I/O 清單 ) Installation instruction for the main ponents 主要元件的安裝指示 For the installation of the SIMATIC peripheral ponents see the section in the System manual “Local peripheral equipment ET200M” (Order No.: 6ES7 1531AA018AA0). SIMATIC外圍元件的安裝參見系統手冊 “Local peripheral equipment ET200M” (Order No.: 6ES7 1531AA018AA0). 經典資料， WORD 文檔，可編輯修改，歡迎下載交流。 Manual. 系統可以通過鍵盤和鼠標（觸摸板）操作，和 Windows操作方式一致。 Click on the radio button with the left mouse key to enable the radio button. Or 鼠標左鍵 點擊單選 按鈕使之啟用 。列表里面可用的選項 逐 行顯示。按下 [Enter]確認， list關閉。 Input and output frames 輸入和輸出框 A frame is a rectangular window which serves for input and/or output of text and numbers (. for setpoints input in manual mode or to input parameters for technologies). Input frames have a white background and output frames are indicated by a colored background. It has a variety of functions: 該框 為長方形窗口，作為文本和數字（如手動模式的輸入設置或工藝參數輸入）輸入和 /或輸出。 Delete text: 刪除文本 ? Click on the frame, press [Del] to delete the text to the right or press [←] to delete the text to the left. 點擊框架，按下 [Del]鍵刪除右邊的文本，或者按下 [←]鍵刪除左邊的文本。 14 3 Switching ON/OFF the control system 控制系統的切換開關 ON/OFF Switching on 打 開 Simultaneously with switching on, the operating and control puter is started. The PC is switched on by pressing the power button behind the disk protection. 打開開關，操作和控制計算機 同時 啟動。屏幕前臺出現登 錄 窗口要求輸入用戶名和密碼。 (啟動 → 關閉 → 關閉 ). When this procedure has been pleted a message appears that the puter can now be switched off or restarted. 當程序完成后，信息提示電腦可以關閉或重啟。用戶界面采用輸入單元（數字、文本、表格的輸入框架）， 與 WINDOWS174。 圖 3: 標題 The system is operated in the service mode, if this symbol is shown in the headline. 標題欄顯示該圖標時，表示系統運行在 維護模式 。 18 Message line 信 息欄 圖 4：信息欄 The message line extends across the plete screen width below the image area. The “Q” at the end of the line gives a tool tip, that there is at least one message to be acknowledged. This is not necessarily the shown message. A message can be acknowledged using the function keys F8 (individual acknowledgement) or F9 (gro