【正文】 .....................................................................................................22 主要工藝設(shè)備.................................................................................................................................22 主要原輔材料、公用工程消耗及來源 ........................................................................................22 輔助公用工程及設(shè)施.....................................................................................................................223 工程分析 .....................................................................................................................................................25 工藝技術(shù)方案 ........................................................................................................................................25 工藝技術(shù)路線確定 ........................................................................................................................25 生產(chǎn)方法和反應(yīng)原理 ....................................................................................................................25 工藝流程及產(chǎn)污分析 ............................................................................................................................27 氫氣制備與凈化工序 .............................................................................................................27 氯化氫合成工序.............................................................................................................................27 三氯氫硅合成工序.........................................................................................................................28 合成氣干法分離工序.....................................................................................................................28 氯硅烷分離提純工序.....................................................................................................................29 三氯氫硅氫還原工序.....................................................................................................................29 還原尾氣干法分離工序 ................................................................................................................30 四氯化硅氫化工序.........................................................................................................................30 氫化氣干法分離工序.....................................................................................................................31 氯硅烷貯存工序...........................................................................................................................31 硅芯制備工序...............................................................................................................................31 產(chǎn)品整理工序...............................................................................................................................31 廢氣及殘液處理工序...................................................................................................................32 廢硅粉處理...................................................................................................................................32 工藝廢料處理工序 ......................................................................................................................32 水量平衡及物料平衡 ............................................................................................................................33 水量平衡.........................................................................................................................................33 項目多晶硅裝置物料平衡.............................................................................................................33 主要關(guān)心元素平衡 ........................................................................................................................33 污染物產(chǎn)生、治理措施及排放分析 ....................................................................................................33 施工期污染物產(chǎn)生、治理及排放.................................................................................................33 營運期污染物產(chǎn)生、治理及排放分析.........................................................................................34 非正常及事故排污分析.................................................................................................................41 項目“三廢” 產(chǎn)生及排放匯總 .......................................................................................................41 項目選址及總圖布置的環(huán)境合理性分析 ...........................................................................................42 項目選址的合理性分析 ................................................................................................................42 總圖布置的合理性分析 ................................................................................................................454 建設(shè)項目所在區(qū)域環(huán)境概況 ......................................................................................................................47 自然環(huán)境概況 .......................................................................................................................................47 地理位置.........................................................................................................................................47 地形、地質(zhì)、地貌 ........................................................................................................................47 氣象條件 ........................................................................................................................................48 水文條件 ........................................................................................................................................48 主要植被及動物資源 ....................................................................................................................48 礦藏 ................................................................................................................................................49 旅游資源 ........................................................................................................................................49 社會環(huán)境概況 .