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【正文】 cenario 1: Operator A’s equipment has Run Time = 8 hours, Test Time = 1 hour, Back Up Time = 0 and Lost Time = 3 hours. ? Scenario 1 Operator A: Manufacturing Efficiency =(8+1+0) / (8+1+0+3) X 100% = 75% Cycle Time Per Mask Layer (C/T) (1) ? Definition o Average number of days required for processing between two photo stages. (1 layers ?. one photo stage to another) o As each individual layer is defined by a photo stage, therefore the number of layers of a product is equivalent to the number of photo stages. Note: For micron technology, there is an average of 25 layers. ? Method of Calculation C/T = (Time which wafer passes the QC test – Time at wafer start) / Number of photo stages. Cycle Time Per Mask Layer (C/T) (2) ? Purpose of Wafer Move Index o Base on the number of layers of the product, and the use of the average cycle time of the fab, we are able to determine the average time required for the product from start to pletion. Thereby, enabling us to decide on the date for the product wafer start in order to meet the delivery schedule. Sample Calculations ? Scenario 1: A particular product has 16 layers, and the time required from wafer start till QC testing is 40 days. ? Scenario 1 C/T per layer: C/T per layer = 40 / 16 = days per layer Wafer Out ? Definition o Total quantity of wafers that passes the QC test. ? Method of Calculation o Production Controller (PC) will announced the official Wafer Out quantity. ? Purpose of Wafer Out Index o The Wafer Out Index will indicate the fab output status. Sample Calculations ? Scenario 1: In the month of February 2021, quantity of wafers that passes QC test =15,000 wafers. ? Scenario 1 Wafer Out: In the month of February 2021 Wafer Out = 15,000 wafers Line Yield ? Definition o Percentage of wafers produced by the fab prior to WAT. ? Method of Calculation Line Yield = (Quantity of Wafer Produced) / [(Quantity of Wafer Produced) + (Quantity of Wafer Scrapped in the Production Process)] = (Quantity of Wafer Produced) / (Quantity of Raw Wafer Used for Production) ? Purpose of Line Yield Index o The Line Yield reflects the quality of the manufacturing system of a fab. The higher the Line Yield the lesser misoperations within the fab. Sample Calculations ? Scenario 1: In the month of February 2021, quantity of raw wafers used = 15,500 wafers. Quantity of wafers at the WAT =15,000 wafers. Total wafer scrapped = 500 wafers. ? Scenario 1: Line Yield = 15,000 / 15,500 = 97% Wafer Acceptance Test (WAT) Yield ? Definition o Percentage of wafer which passes the circuit electrical test. ? Method of Calculation WATYield = (Quantity of Wafer Passes the WAT Test) / (Total Wafer Tested) ? Purpose of Available Time Index o The WATYield reflects the quality of the output from a fab in terms of the electrical performance of the wafer produced. Sample Calculations ? Scenario 1: In the month of February 2021, quantity of wafers tested by WAT = 15,500 wafers. Quantity of wafers that passes WAT =15,000 wafers. Total wafer scrapped = 500 wafers. ? Scenario 1: WATYield = 15,000 / 15,500 = 97% Fab Yield ? Definition o Ratio of the quantity of the wafers that passes the IQC test to the total amount of wafer used from the start of the process. o FabYield = (Line Yield) X (WAT Yield) ? Method of Calculation FabYield = Wafer Out / (Wafer Out + Line Scrapped + WAT Scrapped) ? Purpose of Available Time Index o The FabYield the most important index to a fab as it reflects the overall performance. It takes into consideration of the manufacturing environment, process stability and other contributing factors to the quality of the output from a fab. Sample Calculations ? Scenario 1: In the month of February 2021, quantity of wafers that passes QC test =15,000 wafers. Total wafer scrapped = 1,500 wafers. ? Scenario 1: FabYield = 15,000 / (15,000 + 1,500) = 91%
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