【正文】 電 子式元件合并形成機 電 式 傳 感 設(shè)備 或 傳 感器。自 動 化程度越高，系 統(tǒng)對傳 感器要求越高。 Has the data munication interface, can and the microputer direct munication. The sensor, the signal adjustment electric circuit, the monolithic integrated circuit integration forms ultra largescale integrated on a chip the senior intelligence sensor. American HONY WELL Corporation ST3000 intelligence sensor, the chip size only then has 342mm3, uses the semiconductor craft, makes CPU, EPROM, the static pressure, the differential pressure, the temperature on the identical chip and so on three kind of sensitive units . The intellectualized sensor research and the development, US is at the leading position. American Space Agency when development spaceship called this kind of sensor for the clever sensor (Smart Sensor), on the spaceship this kind of sensor is extremely i mportant. Our country in this aspect research and development also very backward mainly is because our country semiconductor integrated circuit technological level is limited. The sensor’s development is changing day after day since especially the 8039。s frequency difference correspondence different pressure, measures the pressure with the frequency difference method, may eliminate the error which factor and so on ambient temperature brings. When ambient temperature change, two resonant Liang frequencies and the amplitude variation are same, after two frequency differences, its same change quantity can counterbalance mutually. It’s survey most high accuracy may reach %FS. American Silicon Microstructure Inc.(SMI) the pany develops a series of low ends, linear in % to 65% scope silicon micro pressure transmitter, the lowest full measuring range is (1KPa), it makes take the silicon as the material, has the unique three dimensional structure, the light slight machinefinishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti effect but to lose the bridge balance, the output and the pressure bees the proportion the electrical signal. Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, several 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter. The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over e the nonmetallic strain gauge easily the temperature influence insufficiency, has the high stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision which the type brought, sluggish big, shorting and so on slow change, had the precision high, the re liability is high, the volume small characteristic, widely used in domain and so on aviation, petroleum, chemical industry, medical service. Integrates the sensor the superiority is the traditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part and send the part will integrate on together the chip, will cause it to have the calibration, to pensate, from the diagnosis and the work correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR Corporation will develop, each week will be able to produce 10,000. The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microputer and the sensor unifies, it has at the same time the examina tion, the judgment and the information processing function, pares with the traditional sensor has very many characteristics: Has the judgment and the information processing function, can carry on the revision, the error to the observed value pensates , thus enhancement measuring accuracy。 The temperature coefficient is small. The ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the heavy film electronic technol