【正文】
知識(shí)管理與創(chuàng)新 實(shí)務(wù)報(bào)告 Design and Implementation of an Intelligent Manufacturing Execution System for Semiconductor Manufacturing Industry : ; :; : IEEE ISIE 2022, July 912, 2022 Volume: 4, pages: 29482953 Agenda ? What Is MES ? What Is an Intelligent MES ? The Benefit to a FAB ? Case Study ? Summary ? Qamp。A : ; :; : What Is MES ? AMR(Advanced Manufacturing Research): – An integrated architecture for plant wide information management that groups applications and functions around a central mon database used to share product and process data among the applications. ? MESA(MES association): – MES delivers information that enables the optimization of production activities from order launch to finished goods. ? Process Management – flow / service / tools / recipe / EDC plan.... ? Equipment Management – State Mgnt. / AT / UT / PM ? Quality Management – EDA / SPC / Sampling ? WIP(Work In Process) Management – Track In / Out / Hold / Release / split