【正文】
r Filter結(jié)構(gòu)及技術(shù)要求 高 透過率 RGB層 x y x y x yNTSC EBU CRT TFTLCD Red Green Blue高色 純度 ?△ R,G,B : NTSC EBU ≒ CRT TFTLCD NTSC: National Television System Committee EBU: European Broadcast Union NTSC Ratio = △ Area / △ Area 9 Color Filter結(jié)構(gòu)及技術(shù)要求 彩色濾光片色度特性與膜厚關(guān)系 504540353025WY70605040Color Reproducibility (%) Standard High Purity High Trans. New HP TVNotebook Monitor Thick Thin Ramp。D Target Standard NTSC High Trans High Purity TV 10 Color Filter結(jié)構(gòu)及技術(shù)要求 ITO層 90 wt. % In2O310 wt.% SnO2 透明、導(dǎo)電 ※ 低面 電阻 一般 規(guī)格 : ﹤ 30Ω/□ ※ 高 透過 率 ≧ 92% (550 nm, glass reference) ※ 一定膜厚 1500197。177。 150197。 ※ 適當(dāng)?shù)牧?/熱 /化學(xué)穩(wěn)定性以利后續(xù) LCD制程 11 Color Filter制程 Color Filter制程 Color Filter Output Black Matrix R subpixel G subpixel B subpixel ITO Sputtering BM negative resist coating Prebake, Dosing, Developing, Postbaking. R Negative resist Coating, Prebake, Dosing, Developing, Postbaking. G Negative resist Coating, Prebake, Dosing, Developing, Postbaking. B Negative resist Coating, Prebake, Dosing, Developing, Postbak