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89~94[2] . 庫爾普, . 化學機械拋光墊. (2009)[3] 賈衛(wèi)民, 馮振綱. 高硬度聚氨酯彈性體的研究. 科技情報開發(fā)與經(jīng)濟, 2005, 15(16): 128[4] . 拋光墊及其制造方法. (2006)[5] , . 改進的化學機械拋光墊及其制造和使用這種拋光墊的方法. (2008)[6] 劉波. 拋光墊表面構(gòu)造和組織對CMP影響效果的研究. 大連理工大學學位論文, 2006Preparation and characterization of a hard porous polyurethane elastomerHan Yan, Zhou Qing, Liu Hairong, Xue Yingnan, Yu Jianming(Beijing Research Institute of Yantai Wanhua Polyurethane Co. Ltd. 102200)Abstract: The hard porous polyurethane elastomer was prepared by diphenylmethanediisocyanate (MDI), polytetramethylene ether glycol (PTMEG), polypropylene oxide triol, and methylenebisorthochloroaniline (MOCA) as extender. A kind of expansible microspheres was introduced into the elastomers to get a prehensive properties with low density, high rigidity and high modulus. It has investigated the effects of the contents of hard segments, 2,4MDI isomer, the triol and the microspheres on the mechanical properties of casting elastomers, which was then characterized by SEM, DSC, DMA and tensile testing, respectively. The results indicated that the tensile strength, elastic modulus and dynamic mechanical properties of the elastomers increased dramatically while the elongation at break decreased by increasing hard segments contents, and the optimal value of it would be %。 三官能醇用量的影響表4 不同三元醇用量制備彈性體的力學性能樣品編號C1C2C3C4密度/ g/cm3Shore D硬度拉伸強度/ MPa彈性模量/ MPa