sentaurus課程(文件)
【正文】 h of the SD spacer LspSD (not used), ? 5. length of the source/drain contact LSD, ? 6. depth of the implanted well WellDepth, ? 7. depth of the halo profile HaloDepth, ? 8. extension junction depth XjLD, ? 9. source/drain junction depth XjSD (not used). MGOALS Meshing Template File Types Used in Sentaurus Process The main file types used in Sentaurus Process are: ? Sentaurus Process mand file (*.cmd) This file is the main input file type for Sentaurus Process. It contains all process steps and can be edited. This file is referred to as the mand file or input file. ? Log file (*.log) This file is generated by Sentaurus Process during a run. It contains information about each processing step, and the models and values of physical parameters used in it. The amount of information written to the log file can be controlled by certain parameters specified in the Sentaurus Process mand file. ? Structure file (has no extension) This is the Sentaurus Process internal format for saving the simulation. It contains the plete information about the geometry of the device and all datasets. Users can save the simulation in this format at points of interest or at the end of the simulation. The simulation can be resumed from the point where the file was saved by reloading this file into Sentaurus Process. ? TDR boundary file (*) This Synopsysspecific format stores the geometry of the device and is usually saved by the user at the
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