【正文】
microputer and the sensor unifies, it has at the same time the examination, the judgment and the information processing function, pares with the traditional sensor has very many characteristics: Has the judgment and the information processing function, can carry on the revision, the error to the observed value pensates, thus enhancement measuring accuracy。 Has the data munication interface, can and the microputer direct munication. The sensor, the signal adjustment electric circuit, the monolithic integrated circuit integration forms ultra largescale integrated on a chip the senior intelligence sensor. American HONY WELL Corporation ST3000 intelligence sensor, the chip size only then has 342mm3, uses the semiconductor craft, makes CPU, EPROM, the static pressure, the differential pressure, the temperature on the identical chip and so on three kind of sensitive units. The intellectualized sensor research and the development, US is at the leading position. American Space Agency when development spaceship called this kind of sensor for the clever sensor (Smart Sensor), on the spaceship this kind of sensor is extremely important. Our country in this aspect research and development also very backward mainly is because our country semiconductor integrated circuit technological level is limited. The sensor’s development is changing day after day since especially the 8039。 Has from the diagnosis and from the calibration function, enhances the reliability。 enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low. In semiconductor technology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on.. The Japanese horizontal river pany uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing。 The speed of response is quick, is smaller than 1S。 附件 2:外文原文 Dev elopm ent of Sens or New Technolog y Sensor is one kind ponent which can transform the physical quantity, chemistry quantity and the biomass into electrical signal. The output signal has the different forms like the voltage, the electric current, the frequency, the pulse and so on, which can satisfy the signal transmission, processing, recording, and demonstration and control demands. So it is the automatic detection system and in the automatic control industry .If automatic Technology is used wider, then sensor is more important. In information age, the informatio